Tri-Axial Accelerometer Test Tool
AMHS and conveyor manufacturers utilize the Tri-Axial Accelerometer Test Tool to quantify and qualify the vibration characteristics during development, installation and maintenance of their systems. This industry-standard tool is used by 200mm and 300mm FABs to measure the vibration induced to wafer lots by their material handling systems. By detecting the early signs of track misalignment, systems can be maintained to minimize the vibration induced on the wafer lots. The Tri-Axial Accelerometer Test Tool can be used as a stand-alone unit or with the GCI Information Center to provide automated recording with location data supplied by the AMHS vehicle (when configured with a VibCom radio).
GCI's Tri-Axial Accelerometer Test Tool provides a precise vibration measurement solution for AMHS suppliers and end users. This tool simultaneously acquires and records vibration data on the X, Y, and Z axes during automated or manual transportation.
The Tri-Axial Accelerometer Test Tool is battery operated and self-contained. Adapter plates are included to rigidly mount the tool inside a 300mm FOUP. For 200mm applications, optional mounting plates can be ordered that rigidly mount the tool inside a 200mm wafer carrier. An LCD display and keypad provide access to configuration options.
On-board Data Reduction
The Tri-Axial Accelerometer Test Tool performs real-time on-board data reduction of 512 data points per second on each axis. Several data reduction options are provided, including RMS, Peak, Frequency at Peak, and True RMS. On-board data reduction is performed on half-second intervals (using FFT's) producing two reduced data points per second per axis for each reduction type. Recording capacity is limited by available space on the microSD Card (up to a maximum of 9 hours).
Reduced data is stored on an internal SD Card. Several recording sessions can be stored before uploading to a PC for analysis. An RS-232 port is provided for data upload using the InfoCenter Desktop App (contact GCI).
Time Domain Recording Option
The Tri-Axial Accelerometer Test Tool can be optionally configured with the Time Domain Recording option, which records time domain data to the internal microSD card. With this option, Tri-Axial Accelerometer Test Tool records 512 time-domain data points per axis per second directly onto an installed microSD Card. Recording capacity is limited by available space on the microSD Card (up to a maximum of 9 hours). Data reduction is provided on the PC using GCI's VibPlot or InfoCenter Desktop application.
VibPlot Analysis Application
VibPlot provides tools to perform frequency analysis on the recorded time domain data. VibPlot duplicates the on-board data reduction available in the Tri-Axial Accelerometer Test Tool, plus provides additional analysis features, such as three dimentional waterfall plots, and color spectrograms. The time domain data can be displayed, along with graphs of the reduced data (RMS, Peak, True RMS), and FFT results for each 1/2 second interval.
InfoCenter Desktop Application
The InfoCenter Desktop Application provides the same tools as VibPlot in an updated application that can also upload and display on-board reduced data sets.
Features
Axes
- X, Y, and Z
Measurements
- frequency DC to 150Hz
- vibration 0.03g to 2.00g (±0.01g)
Batteries / Charger
- rechargeable NIMH battery pack
- advanced battery charging circuit
- lithium battery provides static RAM backup - up to 10 years life (operating time)
- Low-battery sense with warning indicator.
Data Analysis Types
- RMS
- peak
- RMS and peak
- RMS, peak, and frequency
- RMS, peak, frequency, true RMS, and N
User Interface
- 2 × 16 character LCD
- 4 key keypad
Flash PROM
- stores the system firmware
- easily upgraded using firmware files from GCI
Internal microSD Card
- stores recording sessions
- storage capacity allows for hundreds (depending on recording length) of separate timestamped recording sessions
RS-232 Interface
- one RS-232 port is supplied for downloading the recorded data to a host PC.